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AMAT 0022-94001 High-Performance Sealing and Isolation Component
Product Description: It is a special sealing and isolation component for semiconductor vacuum chamber, which is used to seal the chamber, isolate the gas and maintain the vacuum degree, and is one of the key components to ensure the stability of the process environment.
Technical Specifications:
- Material: high-performance fluororubber or metal sealing material
- Vacuum performance: ultra-low leak rate, meeting high vacuum requirements
Detailed content
- Temperature resistance: can withstand high temperature process and baking
- Compatibility: compatible with various process gases and cleaning agents
Functional Features:
- Excellent sealing performance, maintaining long-term vacuum stability
- High chemical resistance, not easy to swell and deteriorate
- Good elasticity and recovery, long service life
- Meet the semiconductor industry’s ultra-clean requirements
Application Scenarios:
- Vacuum chamber sealing of semiconductor manufacturing equipment
- Wafer etching and deposition process chamber
- Gas transmission and vacuum system
- Equipment maintenance and seal replacement
