Digital guide
You are here:
AMAT 0022-17726
Product Name: Quartz Process Tube Mandrel
Product Description: A high-purity fused quartz mandrel (core rod) used as a forming tool or support structure for manufacturing and servicing vertical/horizontal diffusion furnaces and process tubes. It provides dimensional stability and non-contamination during high-temperature thermal processes.
Detailed content
Technical Specifications:
- Material: Synthetic fused silica (SiO₂, >99.998% purity)
- Outer Diameter: 300mm
- Length: 1200mm
- Thermal Expansion Coefficient: 5.5×10⁻⁷ /°C
- Maximum Working Temperature: 1100°C
- Straightness: ≤ 0.1mm/m
- Surface Finish: Fire-polished / precision ground
Functional Features:
- Ultra-high purity to prevent wafer contamination
- Exceptional thermal stability (zero expansion at high temps)
- High resistance to thermal shock
- Non-porous surface for easy cleaning
- Inert to all semiconductor process gases (O₂, N₂, H₂, NH₃)
Application Scenarios: Mandrel for forming/repairing quartz furnace tubes; support for wafer boats during high-temperature oxidation, annealing, and LPCVD processes in TEL / AMAT diffusion furnaces.
