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Technical Specifications:
- Material: 316L VIM/VAR stainless steel, electropolished
- Orifice Diameter: Precision-drilled (specific sizes per calibration)
- Pressure Rating: Up to 3,000 psig
- Leak Rate: < 1 × 10⁻⁹ atm-cc/sec He
Functional Features:
- Ultra-smooth internal surfaces prevent particle trapping
- Precise, repeatable flow restriction
- Corrosion-resistant to all specialty process gases
- Complies with SEMI standards for gas systems
Application: Installed in gas cabinets and distribution lines for precise control of carrier and reactive gases in CVD and ALD processes.
