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AMAT 0021-96788

Brand & Part Number: Applied Materials (AMAT) 0021-96788

Product Name: Quartz Shield / Insert Tube

Product Description: A high-purity fused quartz component that acts as a protective liner or barrier in high-temperature thermal processing chambers.

Detailed content

Technical Specifications:
  • Material: Synthetic fused silica (quartz), purity > 99.998% SiO₂
  • Max Operating Temperature: 1,100°C
  • Thermal Expansion Coefficient: ~5.5 × 10⁻⁷ /°C
  • Wall Thickness: 3–5 mm

    Functional Features:

  • Ultra-high purity eliminates metallic contamination
  • Excellent optical transmission for infrared heating processes
  • Exceptional thermal shock resistance
  • Chemically inert to oxidizing and inert atmospheres

    Application: Used in oxidation, diffusion, and annealing furnaces to protect heating elements and maintain clean process zones.

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