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AMAT 0021-84531
Product Name: High-Purity Ceramic Insulator / Isolation Ring
Product Description: A precision-engineered ceramic component providing electrical isolation, thermal stability, and mechanical support within high-power RF and plasma environments. It prevents arcing, isolates high-voltage components, and maintains structural alignment.
Technical Specifications:
- Material: Ultra-high-purity (99.9%) alumina (Al₂O₃) ceramic
Detailed content
- Dielectric Strength: ≥ 18 kV/mm
- Maximum Operating Temperature: 850°C continuous
- Thermal Conductivity: ≥ 25 W/m·K
- Density: ≥ 3.95 g/cm³ (fully dense, no porosity)
- Dimensional Accuracy: ±0.02mm for critical inner/outer diameters
- Surface Finish: Ground to Ra < 0.4 μm
Key Features:
- Superior electrical isolation prevents RF crosstalk and parasitic discharges
- Extremely low metallic impurity content (ppb level) eliminates contamination
- Excellent thermal shock resistance withstands rapid thermal cycling
- High mechanical strength resists breakage under mechanical stress
- Non-porous structure prevents gas permeation and particle generation
Application Scenarios:
Used as RF electrode isolators, chamber ground shields, and component supports in AMAT etch, PVD, and CVD chambers. Critical for high-power RF applications in advanced etching systems.
