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AMAT 0021-39943 Pump Port Liner Assembly
Product Description: A precision-engineered liner for vacuum pump ports, designed to protect pump interfaces from process contamination and maintain optimal vacuum performance. It features an IPS-cleaned surface for ultra-high purity applications.
Technical Specifications:
- Material: 6061-T6 aluminum alloy (electropolished)
- Surface Finish: Ra <0.4μm (IPS cleaning standard)
Detailed content
- Dimensions: 356mm (length) × 152mm (diameter)
- Flange Type: ISO-K 160
- Operating Pressure: UHV to 1×10⁻⁹ Torr
- Temperature Range: -40°C to +150°C
- Coating: Optional nickel plating for enhanced corrosion resistance
- Weight: 8.2kg
Functional Features:
- Ultra-smooth surface minimizes particle generation and trap formation
- Precision-machined for perfect alignment with pump ports
- Electropolished surface prevents outgassing in high-vacuum conditions
- Easy installation and removal for maintenance
- Compatibility with all AMAT turbomolecular and cryogenic pumps
- Resistant to common process gases and byproducts
- Long service life reducing pump maintenance requirements
Application Scenarios:
- Vacuum pump inlet protection in PVD and CVD chambers
- Pump port liners for etch and strip processes
- Cryopump and turbopump inlet protection
- Load lock pump port contamination control
- Exhaust management system components
