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AMAT 0021-37887
Product Name: Upper Electrode / Showerhead Faceplate (300mm)
Product Description: A precision-machined, high-purity aluminum faceplate that forms the lower surface of the upper electrode assembly. It features a uniform pattern of gas holes to distribute process gases evenly across the 300mm wafer.
Technical Specifications:
- Material: High-purity 6061-T6 aluminum alloy
Detailed content
- Surface Treatment: Hard anodized (50μm) + Yttria (Y₂O₃) coating
- Dimensions: 380mm diameter x 25mm thick
- Hole Pattern: 400+ precision-drilled orifices (0.5mm diameter)
- Flatness: < 5 μm over gas distribution surface
- Temperature Rating: Up to 400°C
- Cleanliness: Class 1 cleanroom assembled
Key Features:
- Uniform gas distribution eliminates edge effects
- High corrosion resistance to fluorine plasmas
- Low particle generation for high-yield processes
- Optimized thermal conductivity for temperature stability
- Direct drop-in replacement for OEM components
Application Scenarios:
Fitted in AMAT Centura HDP-CVD & dielectric etch chambers for 300mm wafer processing. Critical for depositing high-uniformity dielectric films.
