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AMAT 0021-35789
Product Name: Ceramic Isolator Assembly
Product Description: A high-purity ceramic component providing electrical isolation and structural support in semiconductor vacuum processing chambers.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃) or macor ceramic
Detailed content
- Dielectric Strength: >20 kV/mm
- Temperature Resistance: Up to 1500°C
- Vacuum Compatibility: Ultra-high vacuum (UHV) rated
- Surface Finish: Ra < 0.8 μm for minimal particle generation
- Dimensions: Custom machined to AMAT equipment specifications
Functional Features:
- Excellent electrical insulation properties
- High thermal stability in extreme temperature environments
- Chemical resistance to process gases and plasmas
- Low outgassing characteristics for vacuum applications
- Precision machined for exact dimensional tolerances
- Non-contaminating material composition
Application Scenarios:
- Electrical isolation in RF plasma chambers
- Electrode and chuck support structures
- Gas distribution plate mounting
- Wafer handling components insulation
- Vacuum feedthrough isolation
