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AMAT 0021-33836
Product Name: Ceramic Mounting Bracket
Product Description: A precision-formed ceramic structural component used for mounting, supporting, and isolating electrodes, sensors, and fixtures inside semiconductor vacuum process chambers.
Technical Specifications:
- Material: High-purity macor ceramic or alumina
Detailed content
- Dielectric Strength: ≥18 kV/mm
- Operating Temperature: Up to 800°C
- Mechanical Strength: High flexural and compressive strength
- Surface Finish: Ra < 0.6 μm
- Vacuum Compatibility: UHV rated with low outgassing
Functional Features:
- Superior electrical isolation in high-field environments
- High dimensional stability under thermal load
- Resistance to chemical and plasma erosion
- Non-contaminating for advanced wafer processes
- Precision machined for exact alignment
- Lightweight yet structurally rigid
Application Scenarios:
- Electrode mounting and support
- Sensor and probe positioning
- Vacuum chamber internal fixtures
- RF component isolation
- Semiconductor etch and deposition equipment
