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AMAT 0021-32583
Product Name: Quartz Shield / Liner Insert
Product Description: A high-purity fused quartz component serving as a protective shield or chamber liner. It contains plasma and process byproducts while being transparent to thermal radiation.
Technical Specifications:
- Material: High-purity amorphous fused silica (quartz).
Detailed content
- Form: Cylindrical or contoured shield, precision-formed and fire-polished.
- Purity: Ultra-low metallic impurity content to ensure wafer cleanliness.
- Transmission: High optical transmission for infrared and visible light.
- Thermal Stability: Refractoriness to withstand temperatures exceeding 1,100°C.
Functional Features:
- Excellent resistance to high-temperature plasma and chemical corrosion.
- Non-porous surface minimizes particle trapping and generation.
- Acts as a thermal barrier while allowing radiative heat transfer.
- Easy to clean and replace, extending chamber maintenance cycles.
Application Scenarios:
- Used as a liner in PECVD, Etch, and Thermal processing chambers.
- Protects chamber walls from coating and erosion in Centura and Producer platforms.
