Digital guide
You are here:
AMAT 0021-25078 Chamber Internal Isolation and Support Component
Product Description: This component is used for insulation, isolation and mechanical support between different functional modules in the semiconductor process chamber, preventing electrical short circuit and mechanical displacement, and ensuring the stability of the process environment.
Technical Specifications:
- Material: high-performance insulating ceramic or special polymer material
- Dielectric strength: excellent electrical insulation performance
Detailed content
- Temperature resistance: wide operating temperature range
- Cleanliness: ultra-low particle and volatile matter release
Functional Features:
- Effectively isolate electrical signals and current interference
- Provide stable mechanical support and limit position
- Resist plasma erosion and chemical corrosion
- Meet the high cleanliness requirements of semiconductor manufacturing
Application Scenarios:
- Plasma reaction chamber and etching chamber
- Wafer processing and thin film deposition equipment
- High voltage and high frequency semiconductor equipment
- Equipment maintenance and component replacement
