Digital guide
You are here:
AMAT 0021-21984
Product Name: Ceramic Insulator / Isolation Ring
Product Description: A high-purity ceramic component designed for electrical isolation and structural support within semiconductor process chambers. It insulates powered electrodes from grounded chamber components while maintaining mechanical stability.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃) ceramic, offering exceptional dielectric strength.
Detailed content
- Design: Precision-machined annular ring with tight dimensional tolerances.
- Purity: Ultra-high purity (UHP) grade to prevent metallic contamination in wafer processes.
- Temperature Resistance: Sustains performance in continuous high-temperature environments up to 1,000°C.
Functional Features:
- Provides superior electrical insulation in high-voltage RF plasma environments.
- Excellent thermal shock resistance to withstand rapid heating and cooling cycles.
- Chemically inert to resist etching by corrosive process gases and plasma.
- Low outgassing properties to maintain ultra-high vacuum (UHV) chamber conditions.
Application Scenarios:
- Deployed in PVD (Physical Vapor Deposition) and Etch chambers for electrical isolation.
- Used as focus rings, gas distribution rings, or electrode insulators in Centura and Endura platforms.
