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AMAT 0021-17725
Product Name: 200mm ESC Shutter Disk Assembly
Product Description: A precision-machined disk shutter designed to protect the 200mm Electrostatic Chuck (ESC) surface from plasma exposure, particle contamination, and physical damage during wafer transfer, idle states, and maintenance procedures.
Technical Specifications:
- Material: High-purity 6061-T6 aluminum alloy
Detailed content
- Surface Treatment: Hard anodized (30μm) with anti-spatter, plasma-resistant coating
- Diameter: 260mm (compatible with 200mm wafer platforms)
- Thickness: 12mm
- Flatness: ≤ 8μm across the sealing surface
- Mounting: Flange-mounted with precision alignment dowels
- Operating Temperature: Up to 280°C continuous
- Cycle Life: > 1,000,000 open/close cycles
Key Features:
- Fast actuation for minimal process downtime
- Sealed perimeter design prevents cross-contamination
- Resists plasma erosion and chemical corrosion
- Zero particle shedding under high-velocity motion
- Direct drop-in replacement for Centura DPS chambers
Application Scenarios:
Installed in AMAT Centura DPS (Dielectric Plasma Etch) chambers for 200mm wafers. Critical for processes requiring high cleanliness, such as inter-layer dielectric (ILD) etch and contact hole etch.
