Digital guide
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AMAT 0021-17719
- Brand & Part Number: Applied Materials (AMAT) 0021-17719
- Product Name: Chamber Shield Liner Assembly
- Product Description: A precision-formed multi-piece shield liner assembly for semiconductor process chambers. It lines the chamber interior to protect structural components from deposition, corrosive gases, and plasma erosion while maintaining process uniformity.
Detailed content
- Technical Specifications:
- Material: High-purity anodized aluminum alloy (6061-T6)
- Configuration: Segmented multi-piece design
- Surface Treatment: Hard anodized (25–50 μm thickness)
- Thickness: 2.5 mm
- Fit: Precision-machined to match chamber internal geometry
- Cleaning: Class 10 cleanroom assembled and packaged
- Functional Features:
- Protects chamber body from plasma erosion and deposition buildup
- Optimized geometry ensures uniform gas flow and plasma distribution
- Modular design allows individual segment replacement
- Low outgassing properties for UHV compatibility
- Easy installation and alignment during maintenance
- High structural rigidity resists thermal deformation
- Applications:
- Interior shielding in PVD, CVD, and dielectric etch chambers
- AMAT Endura and Centura platform process chambers
- High-volume semiconductor manufacturing environments
