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AMAT 0021-15694
Product Name: 200mm Waffle-Less Slit Valve Door (LP Type)
Product Description: A precision-machined door assembly for low-pressure (LP) slit valves, designed to create a vacuum-tight seal for 200mm wafer transfer slots. The “waffle-less” design minimizes surface area for particle adhesion and simplifies cleaning.
Technical Specifications:
- Material: Hard-anodized 6061-T6 aluminum
Detailed content
- Dimensions: 200mm wafer format compatible
- Weight: 0.7 kg
- Surface Flatness: ±0.0005 inches across sealing face
- Operating Pressure Range: UHV to 1 atmosphere
Functional Features:
- Optimized geometry for reliable actuation and sealing
- Smooth, non-porous surface reduces particle traps
- Compatible with elastomer seals (e.g., Kalrez®, Chemraz®)
- High rigidity prevents warping under differential pressure
- Designed for long service life with minimal maintenance
Application Scenarios: Used in vacuum isolation slit valves on 200mm semiconductor process tools (e.g., Centura, Endura) for transferring wafers between high-vacuum process chambers and lower-pressure load locks.
