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Technical Specifications:
- Material: Viton® 75 Durometer fluoroelastomer
- Inner Diameter: Precision matched to chamber lid dimensions
- Cross-Section Diameter: 0.275 inches (standard)
- Hardness: 75 Shore A
- Temperature Range: -20°C to +200°C
- Vacuum Rating: Leak rate < 1 × 10⁻⁹ atm-cc/sec He
Functional Features:
- Excellent compression set resistance for long-term sealing
- High chemical resistance to process gases and plasmas
- Low outgassing properties for UHV compatibility
- High temperature stability in cyclic thermal environments
- Smooth surface finish to minimize particle entrapment
Application: Used as a primary seal for chamber lids in PVD, Etch, and CVD vacuum chambers.
