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AMAT 0021-12737 Precision Mechanical Fixing and Connecting Component
Product Description: It is a high-precision mechanical connecting and fixing part applied in semiconductor equipment, which is used to fasten, position and connect key components in the chamber, ensuring the stability of the mechanical structure during the operation of the equipment.
Technical Specifications:
- Material: special alloy with high strength, low magnetism and low pollution
- Dimensional tolerance: strict micron-level tolerance control
Detailed content
- Surface treatment: anti-corrosion, anti-oxidation, low particle release
- Mechanical performance: high tensile strength and fatigue resistance
Functional Features:
- Stable connection, not easy to loose under high frequency operation
- Low outgassing, suitable for high vacuum environment
- Easy to disassemble and assemble, convenient for equipment maintenance
- Good compatibility with the original equipment structure
Application Scenarios:
- Internal structure fixing of semiconductor process chamber
- Wafer handling and transmission mechanism
- High vacuum coating and etching equipment
- Equipment spare parts and maintenance replacement
