Digital guide
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Technical Specifications:
- Material: Hard anodized 6061 aluminum alloy
- Coating Thickness: 25μm hard anodized layer
- Surface Finish: Electropolished interior
- Vacuum Compatibility: Ultra‑high vacuum rated
- Mounting: Precision positioning notches and holes
Functional Features:
- High plasma and chemical corrosion resistance
- Smooth surface to reduce particle trapping
- Structural rigidity to maintain dimensional stability
- Optimized geometry for uniform gas flow
- Lightweight design for convenient maintenance
Application: Used in Etch and PVD chambers to extend chamber service life and reduce cleaning frequency.
