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AMAT 0021-09104
Product Name: Precision-Aligned Cathode Liner Assembly
Product Description: A high-purity aluminum cathode liner with precision alignment features, designed to surround PVD cathodes, confine plasma, and ensure uniform sputtering deposition while protecting chamber components.
Technical Specifications:
- Material: High-purity 6061-T6 aluminum alloy
Detailed content
- Surface Treatment: Anodized with plasma-resistant coating
- Structure: Cylindrical with precision alignment slots and mounting flanges
- Thickness: Uniform 5mm wall construction
- Temperature Resistance: Up to 550°C
- Alignment Tolerance: ±0.02mm concentricity
Functional Features:
- Precision alignment ensures symmetrical plasma distribution
- Confines sputtering particles to improve target utilization
- Reduces back-sputtering onto chamber walls
- Minimizes particle contamination during deposition
- Quick-release mounting for efficient replacement
Application Scenarios: Specifically designed for P5000 and Endura PVD chambers, particularly for titanium, aluminum, and copper deposition processes.
