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AMAT 0021-09098
Product Name: High-Temperature Ceramic Shield
Product Description: A precision-machined high-purity alumina ceramic shield that protects chamber components from thermal radiation and plasma exposure in high-temperature semiconductor processes.
Technical Specifications:
- Material: 99.8% high-purity alumina (Al₂O₃)
Detailed content
- Max Operating Temp: 1700°C
- Compressive Strength: 2200MPa
- Dielectric Strength: >18kV/mm
- Surface Finish: Ground to Ra <0.8μm
Functional Features:
- Excellent thermal stability at extreme process temperatures.
- Resists chemical attack from fluorine and chlorine plasmas.
- High electrical isolation for RF component protection.
- Non-contaminating material preserves wafer yield and quality.
Application Scenarios: Thermal shielding and component protection in high-temperature epitaxy, diffusion, and RTP processes.
