Digital guide
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AMAT 0021-08845
Product Name: Wedge Post / Spider Assembly (Wafer Support)
Product Description: A multi-leg, ceramic-coated metallic assembly that supports the wafer edge during high-temperature processes. It provides stable, low-contact wafer support and allows for uniform thermal transfer.
Technical Specifications:
- Material: Stainless steel core with high-purity alumina coating
Detailed content
- Configuration: 3-point (tri-star) contact design
- Contact Tip: Radius 0.5mm (minimizes wafer contact area)
- Height: 15mm (fixed)
- Temperature Rating: Up to 700°C
- Coating Thickness: 200μm (dense, non-porous)
- Mounting: Bolt-down to chamber pedestal
Key Features:
- Minimizes wafer backside contamination & defects
- High thermal stability for uniform processing
- Ceramic coating prevents metallic contamination
- Robust design resists breakage from thermal cycling
- Easy installation & alignment
Application Scenarios:
Used in AMAT Centura RTP (Rapid Thermal Processing) & Epitaxy chambers. Supports wafers during high-temperature annealing and silicon epitaxy processes.
