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AMAT 0021-08690 Wafer Support and Positioning Assembly
Product Name: Wafer Support and Positioning Assembly
Product Description: It is a precision mechanical structural component used in the wafer reaction chamber, which is used to support, fix and position the wafer base and internal components, and maintain the mechanical stability and coaxiality in the process environment.
Technical Specifications:
- Material: high-performance ceramic or special engineering ceramic composite
- Dimensional accuracy: micron-level machining accuracy, good coaxiality and verticality
Detailed content
- Insulation performance: excellent electrical insulation, suitable for high-voltage and plasma environment
- Temperature resistance: can withstand the high and low temperature cycle impact in the process
Functional Features:
- Stable support, no deformation under working load
- Non-conductive, avoiding electrical interference and abnormal discharge
- Low particle release, in line with the cleanliness requirements of the semiconductor chamber
- Easy to install and replace, convenient for equipment maintenance
Application Scenarios:
- Wafer electrostatic chuck and base assembly
- Plasma etching and thin film deposition chamber
- Semiconductor wafer processing and coating equipment
- Equipment upgrade and maintenance replacement parts
