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AMAT 0021-08690 Precision Mechanical Fastener Assembly
Product Overview: The AMAT 0021-08690 is a high-precision mechanical fastener assembly designed exclusively for Applied Materials semiconductor equipment. It is used to securely fasten critical components such as chamber liners, electrodes, and sensor mounts, ensuring structural stability and alignment in high-vacuum, high-temperature environments. This assembly is engineered with high-strength materials and precise machining to meet AMAT’s strict performance standards, providing reliable fastening even under the harsh operating conditions of semiconductor fabs. It is a key component for maintaining equipment integrity and preventing component displacement during high-speed operation or thermal cycling.
Technical Specifications: – Material Composition: Heat-treated 17-4 PH stainless steel, offering high tensile strength (1100 MPa) and excellent corrosion resistance. – Fastener Type: Captive screw assembly with a integrated washer, designed to prevent loosening under vibration.
Detailed content
– Dimensional Specifications: Thread size M5×0.8, length 15mm, head diameter 10mm, with a hex socket drive for secure tightening. – Tolerance: ±0.005mm for thread pitch and ±0.01mm for overall length, ensuring precise fit with mating components. – Surface Treatment: Passivated finish to enhance corrosion resistance and reduce particle generation. – Operating Environment: Suitable for high-vacuum conditions (base pressure ≤ 1×10⁻⁸ Pa) and operating temperatures ranging from -30°C to 200°C. – Load Capacity: Maximum tensile load of 5000 N, ensuring secure fastening of heavy components. – Certification: Complies with ISO 9001 quality standards and SEMI S2/S8 safety guidelines.
Functional Features: – Provides secure, vibration-resistant fastening of critical equipment components, preventing displacement and ensuring structural stability. – The captive design eliminates the risk of fastener loss during equipment maintenance, reducing downtime and contamination risks. – Resists corrosion and oxidation in harsh fab environments, including exposure to plasma and process gases. – Ensures precise alignment of components, which is critical for maintaining process uniformity and equipment performance. – Compatible with AMAT’s standard tooling, simplifying installation and maintenance procedures. – Withstands thermal cycling and vibration without loosening, ensuring long-term reliability and reducing maintenance frequency.
Application Scenarios: – Used in AMAT’s plasma etching, CVD, and PVD chambers to fasten liners, electrodes, and sensor mounts. – Installed in wafer handling systems to secure components such as robot arms and wafer carriers. – Applied in vacuum system components, including turbomolecular pumps and vacuum chambers. – Suitable for 200mm and 300mm wafer manufacturing lines, where equipment stability and precision are critical. – Ideal for high-volume production fabs, where equipment uptime and maintenance efficiency are essential. – Used in research and development equipment for securing custom components during process testing.
