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AMAT 0021-08163
Product Name: Precision Ceramic Insulator Component
Product Introduction: A high-purity ceramic insulator designed for electrical isolation in semiconductor process chambers, providing reliable insulation in high-voltage and plasma environments.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃) ceramic for excellent insulation
Detailed content
- Dielectric Strength: >20 kV/mm for high-voltage isolation
- Thermal Stability: Withstands temperatures up to 1,500°C
- Surface Finish: Polished to minimize particle adhesion
- Dimensional Tolerance: Precision machining for exact fit in chamber assemblies
Functional Features:
- Provides reliable electrical isolation in high-voltage process environments
- Resists plasma-induced degradation and chemical corrosion
- Low outgassing for UHV chamber compatibility
- High thermal stability for extreme process temperature conditions
- Minimizes particle generation in ultra-clean semiconductor environments
Application Scenarios:
- Electrical insulation in semiconductor plasma etch and deposition chambers
- Isolator component for AMAT PVD and CVD process systems
- Replacement insulator for semiconductor equipment maintenance
- Critical component for high-voltage RF delivery systems
