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AMAT 0021-07905
Product Name: High‑Voltage Ceramic Insulator Spacer
Product Description: A precision‑machined ceramic component used to electrically isolate and physically support electrodes, chucks, and chamber components in high‑voltage plasma environments.
Technical Specifications:
- Material: High-purity alumina ceramic (Al₂O₃), ≥99.6% purity
Detailed content
- Dielectric Strength: ≥20 kV/mm
- Compressive Strength: ≥2000 MPa
- Operating Temperature: -50°C to +1000°C
- Dimensional Tolerance: ±0.005 mm
Functional Features:
- Provides reliable electrical isolation in high-voltage RF environments
- Maintains mechanical stability under thermal cycling
- Resists plasma erosion and chemical corrosion
- Low outgassing for ultra-high vacuum compatibility
- Non-porous surface minimizes particle generation
Application Scenarios: Used as insulating supports for electrodes, electrostatic chucks, and RF components in process chambers.
