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AMAT 0021-00105
Product Name: Ceramic Insulation Washer
Product Description: A high-purity ceramic washer providing electrical insulation and mechanical spacing between conductive components in high-voltage and vacuum semiconductor environments.
Technical Specifications:
- Material: High-purity alumina ceramic (Al₂O₃)
Detailed content
- Dielectric Strength: ≥20 kV/mm
- Temperature Resistance: Up to 1400°C
- Dimensional Tolerance: ±0.01 mm
- Surface Finish: Polished to minimize particles
- Outgassing Rate: Ultra-low for UHV compatibility
Functional Features:
- Excellent electrical insulation performance
- High compressive strength and wear resistance
- Chemical inertness to plasma and process gases
- Dimensional stability under thermal cycling
- Non-contaminating material composition
- Precision molding for consistent dimensions
Application Scenarios:
- RF electrode and chuck isolation
- High-voltage component spacing
- Vacuum feedthrough assembly
- Plasma chamber internal hardware
- Semiconductor process chamber components
