Digital guide
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AMAT 0020-97794
Product Name: High-Temperature Ceramic Insulator
Product Description: A precision-machined high-purity ceramic component designed to provide electrical isolation and mechanical support for high-voltage/RF components in extreme high-temperature vacuum environments.
Technical Specifications:
- Material: 99.9% High-purity alumina (Al₂O₃)
Detailed content
- Dielectric Strength: > 20kV/mm
- Compressive Strength: > 2800MPa
- Thermal Conductivity: 35 W/m·K
- Maximum Operating Temperature: 1800°C
- Dimensions: 30mm (OD) × 60mm (Height)
- Tolerance: ±0.02mm
- Surface Finish: Precision ground, Ra < 0.4μm
Functional Features:
- Exceptional electrical isolation for high-voltage/RF electrodes
- Non-contaminating, ultra-low outgassing for UHV compatibility
- Excellent thermal shock resistance under rapid thermal cycling
- Inert to fluorine, chlorine, and oxygen plasmas
- High mechanical rigidity to prevent component misalignment
Application Scenarios: Insulating RF coils, heater electrodes, and electrostatic components in etch chambers, PVD reactors, and ion implantation systems.
