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AMAT 0020-87594 UPA Front Bracket
Product Overview: The AMAT 0020-87594 is a precision UPA front bracket specifically designed for the 300mm Reflexion LK wafer handling system of Applied Materials semiconductor equipment. It serves as a structural support component, securing critical parts of the wafer handling mechanism, including the robot arm and end effector assembly. This bracket is manufactured from high-strength materials with precise machining, ensuring structural stability, alignment, and compatibility with the Reflexion LK system. It is a critical component for maintaining the precision and reliability of the wafer handling system, ensuring damage-free wafer transfer and consistent operation in high-volume semiconductor production.
Technical Specifications:
– Material Composition: High-strength 6061-T6 aluminum alloy, offering a tensile strength of 310 MPa and excellent corrosion resistance.
Detailed content
– Dimensions: Length 150mm, width 80mm, height 50mm, with a weight of 0.6kg. – Surface Treatment: Anodized finish (clear) with a surface resistance of 10⁶-10⁹ Ω (anti-static compliance), preventing static buildup and particle attraction. – Dimensional Tolerance: ±0.01mm, ensuring precise fit and alignment with the Reflexion LK wafer handling system components. – Mounting Holes: Four M6 threaded mounting holes, spaced 100mm apart, for secure attachment to the equipment frame. – Operating Environment: Cleanroom compatible (Class 1), temperature range: 18-25°C, humidity: 40-60% (non-condensing). – Load Capacity: Maximum static load of 50 kg, ensuring structural stability under the weight of the robot arm and end effector. – Certification: Complies with SEMI S2/S8 safety standards, ISO 14644-1 cleanroom standards, and RoHS compliance.
Functional Features: – Provides structural support for the UPA (Wafer Handling Unit) components of the 300mm Reflexion LK system, ensuring stability during wafer transfer. – Ensures precise alignment of the robot arm and end effector, critical for accurate wafer picking and placing. – Resists corrosion and wear in cleanroom environments, extending the bracket’s service life and reducing maintenance frequency. – Prevents static buildup with an anti-static anodized finish, minimizing particle attraction and wafer contamination. – Features a lightweight design that does not add unnecessary weight to the wafer handling system, ensuring smooth motion. – Integrates seamlessly with the Reflexion LK system, requiring no modifications for installation. – Designed for easy maintenance, with accessible mounting points for quick removal and replacement.
Application Scenarios: – Installed in AMAT’s 300mm Reflexion LK wafer handling systems for Centura and Endura series equipment. – Used in high-volume 300mm wafer manufacturing lines, including logic chips, memory chips (DRAM, NAND), and power semiconductor devices. – Applied in wafer handling systems where structural stability and alignment are critical to damage-free wafer transfer. – Suitable for cleanroom environments (Class 1) where cleanliness, anti-static properties, and precision are essential. – Ideal for semiconductor fabs looking to maintain high operational efficiency and wafer quality. – Used in research and development facilities with 300mm Reflexion LK systems for advanced wafer handling testing.
