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AMAT 0020-87570
Product Name: Wafer Lift Pin Assembly
Product Description: A precision-machined ceramic lift pin assembly used to elevate and position wafers within semiconductor processing chambers. It provides stable, non-contaminating wafer support during high-vacuum processes.
Technical Specifications:
- Material: High-purity alumina ceramic
Detailed content
- Length: 150mm
- Diameter: 6mm
- Surface Finish: Polished to Ra < 0.4 μm
- Temperature Resistance: Up to 1000°C
- Vacuum Compatibility: Ultra-high vacuum (UHV) rated
- Load Capacity: 5 kg vertical load
Functional Features:
- Excellent electrical insulation properties
- High mechanical strength and wear resistance
- Chemical inertness to process gases and plasmas
- Non-contaminating material composition
- Precision dimensional tolerances for accurate positioning
- Low particle generation during operation
Application Scenarios:
- Wafer handling and positioning in process chambers
- PVD, CVD, and etch chamber wafer support
- Semiconductor wafer manufacturing cleanrooms
- AMAT Centura and Endura platform wafer lift systems
- High-temperature vacuum processing applications
