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AMAT 0020-78420
Brand & Part Number: Applied Materials (AMAT) 0020-78420
Product Name: Ceramic Insulator Block
Product Description: A high-purity ceramic component providing electrical and thermal insulation between conductive metal parts within high-vacuum and high-voltage semiconductor process environments.
Detailed content
Technical Specifications:
- Material: 99.6% high-purity aluminum oxide (Al₂O₃) ceramic
- Dielectric Strength: > 16 kV/mm
- Compressive Strength: > 2,100 MPa
- Dimensional Tolerance: ± 0.001 inches
- Temperature Range: -20°C to +500°C
- Surface Finish: Ground to Ra ≤ 0.8 μm
Functional Features:
- Superior electrical insulation to prevent arcing and short-circuiting in RF environments
- Excellent thermal stability under cyclic temperature fluctuations
- Ultra-low outgassing rate, compliant with UHV (Ultra-High Vacuum) standards
- Chemically inert to all semiconductor process gases and plasmas
- High mechanical strength to resist compression and impact loads
Application: Used as insulating supports for RF electrodes, electrostatic chucks (ESC), and chamber ground shields in Etch and PVD systems.
