Digital guide
You are here:
AMAT 0020-77444
- Brand & Part Number: Applied Materials (AMAT) 0020-77444
- Product Name: Electrostatic Chuck (ESC) Guard Ring
- Product Description: A precision-engineered ceramic guard ring designed to surround electrostatic chucks (ESC) in semiconductor process chambers. It provides edge confinement, electrical isolation, and uniform plasma distribution around wafer peripheries.
Detailed content
- Technical Specifications:
- Material: 99.5% high-purity alumina (Al₂O₃)
- Wafer Compatibility: 200mm
- Dimensions: 220mm OD × 202mm ID × 8mm thickness
- Dielectric Strength: ≥ 15kV/mm
- Maximum Operating Temperature: 1300°C
- Surface Finish: Polished (Ra ≤ 0.5μm)
- Flatness: ≤ 5μm across entire surface
- Functional Features:
- Excellent dielectric insulation for high-voltage ESC operation
- Uniform edge confinement improves wafer processing uniformity
- High thermal stability maintains performance at process temperatures
- Plasma-resistant composition extends service life
- Non-contaminating surface prevents wafer edge defects
- Precision machining ensures perfect ESC alignment
- Applications:
- ESC edge confinement in PVD and CVD chambers
- Wafer clamping systems in AMAT Endura platforms
- High-vacuum processes requiring electrostatic wafer holding
