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AMAT 0020-75908
Product Name: Ceramic Heater Shield
Product Description: A multi-layered, high-temperature ceramic shield designed to surround and insulate wafer heater pedestals, ensuring uniform thermal distribution and minimizing heat loss within the process chamber.
Technical Specifications:
- Material: Aluminum nitride (AlN) ceramic
Detailed content
- Outer Diameter: 310mm
- Inner Diameter: 250mm
- Thickness: 10mm
- Thermal Conductivity: 180 W/m·K
- Maximum Operating Temperature: 1400°C
- Dielectric Strength: > 15kV/mm
- Flatness: ≤ 0.05mm
Functional Features:
- Excellent thermal uniformity for consistent wafer heating
- High electrical isolation for heater electrode protection
- Low thermal mass for rapid thermal response
- Inert to process gases and plasmas
- High mechanical strength to resist thermal stress
Application Scenarios: Thermal shielding for 300mm ESC heater pedestals in AMAT Endura PVD and ALD chambers.
