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AMAT 0020-75580
Product Name: Wafer Lift Pin Guide Assembly
Product Description: A precision linear guide system for wafer lift pins. It ensures smooth, vertical travel of lift pins, preventing wobble and particle generation during wafer elevation.
Technical Specifications:
- Material: 316L stainless steel (body), PEEK (guide bushings)
Detailed content
- Number of Channels: 3 (tri-lift pin system)
- Bore Tolerance: ± 0.002mm
- Surface Finish: Electropolished (Ra < 0.6μm)
- Stroke: 25mm vertical travel
- Wear Rate: < 0.1μm per 100,000 cycles
- Cleanliness: Class 1 cleanroom assembled
Key Features:
- Self-lubricating PEEK bushings eliminate particle generation
- Precision alignment prevents lift pin binding
- High cycle life for minimal maintenance
- Corrosion-resistant to all process chemistries
- Easy installation and replacement
Application Scenarios:
Used in all AMAT Centura & Endura 200mm/300mm process chambers. Essential for reliable wafer transfer in PVD, CVD, and Etch environments.
