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AMAT 0020-63668
Brand & Part Number: Applied Materials (AMAT) 0020-63668
Product Name: DPS II Slit Valve Door Blocker
Product Description: A precision-machined mechanical component designed to block and secure the slit valve door in DPS II etch chambers, ensuring proper chamber sealing and isolation during processing.
Detailed content
Technical Specifications:
- Material: Hard anodized 6061 aluminum alloy
- Coating Thickness: 25 μm hard anodized layer
- Surface Finish: Electropolished
- Operating Temperature: Up to 150°C
- Mounting: Single-rod design with precision alignment holes
- Vacuum Compatibility: UHV-rated, low outgassing
Functional Features:
- High structural rigidity to maintain valve alignment
- Smooth surface to prevent particle generation
- Corrosion resistance to etch byproducts and cleaning chemicals
- Precise fit to ensure consistent valve sealing
- Lightweight construction for easy installation
Application: Installed in DPS II etch chambers to secure slit valve doors and maintain vacuum integrity.
