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AMAT 0020-63120
Product Name: Precision Machined Chamber Component
Product Description: A high-precision machined component for semiconductor vacuum chambers, manufactured to exacting tolerances for reliable performance in advanced wafer processing applications.
Technical Specifications:
- Material: 6061-T6 aluminum alloy
Detailed content
- Surface Finish: Electropolished to Ra <0.4μm
- Dimensional Tolerances: ±0.005mm
- Hardness: T6 temper (95 HRB)
- Corrosion Resistance: Anodized coating (50μm thickness)
- Vacuum Compatibility: UHV suitable
- Operating Temperature: -40°C to +120°C
Functional Features:
- Ultra-smooth surface to minimize particle generation
- High dimensional accuracy for perfect fit and alignment
- Excellent corrosion resistance to process gases
- Lightweight yet structurally rigid
- Easy to clean and maintain
- Compatible with various vacuum sealing methods
Application Scenarios:
- Semiconductor vacuum chamber liners
- Wafer processing equipment components
- Gas distribution manifolds
- Vacuum measurement ports
- Process chamber access doors
