Digital guide
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AMAT 0020-62324
Product Name: Precision Machined Structural Component
Product Description: A high-precision structural element designed for critical load-bearing and alignment functions within semiconductor processing chambers. Manufactured to ultra-tight tolerances to ensure dimensional stability under high-vacuum and thermal cycling conditions.
Technical Specifications:
- Material: High-grade, corrosion-resistant aluminum alloy (6061-T6 / 7075-T7351)
Detailed content
- Surface Finish: Electroless nickel plating (50-100 μin) for enhanced chemical resistance and low outgassing
- Dimensional Tolerance: ±0.0005 inches for critical mating surfaces
- Hardness: Minimum 65 HRC (surface)
- Weight: 1.2 kg
Functional Features:
- Precision-drilled mounting holes for secure, repeatable installation
- Precision-ground surfaces for optimal sealing and alignment
- Low particulate generation design to maintain ultra-clean process environments
- Compatible with high-temperature bake-out procedures up to 150°C
Application Scenarios: Primarily utilized in PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition), and Etch chambers for component mounting, structural support, and precise alignment within Applied Materials’ Centura and Endura platforms.
