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AMAT 0020-56092
Product Name: Ceramic Chamber Shield Assembly
Product Description: High-purity ceramic protective shield for semiconductor process chambers, resisting plasma and chemical corrosion.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃) ceramic
- Density: ≥3.95 g/cm³
Detailed content
- Thermal conductivity: 25 W/m·K at 25°C
- Dielectric strength: ≥15 kV/mm
- Maximum operating temperature: 1700°C
- Precision machined to exact chamber dimensions
Functional Features:
- Excellent resistance to plasma erosion and chemical corrosion
- High dielectric strength for electrical insulation
- Low particle generation for ultra-clean processes
- Superior thermal shock resistance
- Extended service life in harsh process environments
Application Scenarios:
- Etch and deposition chamber liner protection
- High-temperature semiconductor process environments
- Plasma containment in reactive ion etching systems
- Centura and DPS chamber component protection
