Digital guide
You are here:
AMAT 0020-55519
- Product Name: Ceramic Isolator Washer
- Product Description: High-purity ceramic washer providing electrical insulation and mechanical spacing in high-voltage sections of semiconductor process chambers.
- Technical Specifications:
- Material: 99.6% high-purity alumina (Al₂O₃)
- Dimensions: 10mm OD × 5mm ID × 3mm thickness
Detailed content
-
- Dielectric Strength: >20 kV/mm
- Max Operating Temperature: 1700°C
- Surface Finish: Ra < 0.8μm
- Compressive Strength: >2000 MPa
- Functional Features:
- Excellent electrical isolation in RF environments
- Non-contaminating, low-outgassing for UHV compatibility
- High resistance to plasma erosion
- Chemical inertness to process gases
- Precision-machined tight tolerances
- Thermal shock resistance
- Applications: Insulation for electrode mounts, RF coil supports, and high-voltage feedthroughs in PVD, CVD, and Etch chambers.
