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AMAT 0020-54777
roduct Name: ESC Pedestal Insulator Ring
Product Description: A high-purity ceramic ring that provides electrical isolation between the ESC pedestal and the grounded chamber body. It prevents RF leakage and ensures stable electrostatic clamping.
Technical Specifications:
- Material: 99.9% high-purity alumina (Al₂O₃)
Detailed content
- Dimensions: 320mm OD x 260mm ID x 25mm thick
- Dielectric Strength: ≥ 25 kV/mm
- Thermal Conductivity: ≥ 28 W/m·K
- Temperature Rating: Up to 600°C
- Surface Finish: Ground & lapped (Ra < 0.4μm)
- Density: ≥ 3.95 g/cm³ (fully dense)
Key Features:
- Excellent electrical isolation in high RF field environments
- Ultra-low impurity content prevents wafer contamination
- High thermal conductivity for efficient heat dissipation
- Mechanically robust to resist thermal cycling stress
- Precision dimensions ensure perfect fit and alignment
Application Scenarios:
Deployed in AMAT Endura PVD and Centura Etch chambers utilizing ESC technology. Critical for metal gate, contact, and via etch processes.
