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AMAT 0020-54672 High-Purity Gas Purification Cartridge
Product Introduction: This is a special high-efficiency gas purification component for semiconductor manufacturing, used to remove trace impurities such as particles, moisture, oxygen and organic matter in process gas. It can provide ultra-high-purity gas output for key processes, effectively reduce wafer defects caused by gas pollution, improve device yield and reliability, and is an important guarantee for advanced semiconductor manufacturing processes such as EUV lithography and 3D NAND.
Technical Specifications:
- Filtration Efficiency: 99.9999% for particles ≥0.003 μm, meeting the strict requirements of advanced processes
Detailed content
- Residual Moisture: <1 ppb after purification, realizing ultra-dry gas output
- Organic Impurity Removal: <1 ppt total volatile organic compounds, avoiding organic pollution
- Maximum Operating Pressure: 150 psig, adapting to conventional gas pipeline pressure
- Flow Rate Range: 0–50 slm, meeting the flow demand of most single-point gas consumption equipment
- Service Life: Up to 10,000 hours under standard working conditions
- Shell Material: 316L electropolished stainless steel, with clean inner surface and no pollution
Functional Features:
- Disposable design, avoiding secondary pollution caused by repeated cleaning and regeneration
- Low pressure drop design, reducing the load of gas supply system and improving energy efficiency
- Standard interface, compatible with conventional gas pipeline installation, easy to replace
- Good compatibility with various high-purity gases such as corrosive, oxidizing and reducing gases
- Stable performance, can maintain high purification efficiency in long-term continuous operation
- Color identification function, convenient for classified management and rapid replacement
Application Scenarios:
- Gas supply system of EUV (Extreme Ultraviolet) lithography equipment
- Ion implantation equipment for semiconductor wafer doping process
- High-purity gas distribution cabinet and pipeline system in semiconductor factory
- Gas purification of MEMS, advanced packaging and optoelectronic device manufacturing
- Special gas supply for laboratory and R&D equipment
