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AMAT 0020-48628
Product Name: Grounded Lift Pin Assembly
Product Introduction: A precision-engineered grounded lift pin assembly for 300mm wafer semiconductor process chambers, enabling safe, stable, and electrically grounded wafer lifting and positioning.
Technical Specifications:
- Wafer Compatibility: 300mm (12-inch) wafer processing systems
Detailed content
- Material: High-purity ceramic or stainless steel with conductive coating
- Surface Finish: Ultra-smooth to minimize particle adhesion and wafer damage
- Electrical Conductivity: Grounded design for electrostatic discharge (ESD) protection
- Dimensional Tolerance: Precision machining for exact chamber fit
Functional Features:
- Stable, grounded lifting of 300mm wafers during process cycles
- ESD protection to prevent wafer damage from electrostatic discharge
- Minimizes particle generation and wafer contamination risks
- Resists chemical attack from process gases and cleaning solutions
- Easy installation and replacement during chamber maintenance
Application Scenarios:
- Wafer lifting and positioning in 300mm semiconductor process chambers
- Grounded lift pin assembly for AMAT Producer series CVD systems
- Critical component for wafer handling in PVD and etch processes
- Replacement lift pin for 300mm wafer fabrication equipment maintenance
