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AMAT 0020-44858
Product Name: Electrostatic Chuck (ESC) Insulator Ring
Product Description: High-performance ceramic insulator ring for electrostatic chuck assemblies in semiconductor vacuum chambers.
Technical Specifications:
- Material: High-purity boron nitride (BN) composite ceramic
Detailed content
- Dielectric constant: 4.1 at 1 MHz
- Volume resistivity: ≥10¹⁴ Ω·cm
- Thermal conductivity: 80 W/m·K
- Operating temperature: -50°C to 600°C
- Precision ground to tight dimensional tolerances
Functional Features:
- Provides electrical isolation between chuck and pedestal
- Excellent thermal conductivity for uniform heat distribution
- Low dielectric loss for high-frequency applications
- Non-contaminating material composition
- Resistance to plasma and process chemicals
Application Scenarios:
- Electrostatic chuck assemblies in PVD chambers
- Wafer clamping systems in semiconductor etch tools
- High-temperature vacuum wafer processing
- Endura and Centura platform electrostatic clamping systems
