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AMAT 0020-43500
Product Name: High-Purity Ceramic Insulator Ring
Product Description: A precision-machined ceramic ring designed to provide electrical isolation and thermal stability between critical components within semiconductor process chambers. It serves as a non-conductive barrier to prevent electrical arcing and ensure process purity.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃), ≥ 99.6% purity
Detailed content
- Dimensional Tolerance: ± 0.005 mm for precise fit
- Surface Finish: Ra ≤ 0.4 μm, smooth and non-porous
- Temperature Resistance: Continuous operation up to 1,000°C
- Dielectric Strength: ≥ 15 kV/mm
Functional Features:
- Superior Electrical Isolation: Prevents stray currents and RF interference.
- High Thermal Stability: Maintains structural integrity under extreme thermal cycling.
- Chemical Inertness: Resists corrosion from process gases and plasmas (e.g., fluorine, chlorine).
- Low Particle Generation: Smooth surface minimizes flaking and contamination.
- High Mechanical Strength: Resists breakage and wear in demanding environments.
Application: Used in Etch, PVD, and CVD chambers for isolating electrodes, pedestals, and RF components.
