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AMAT 0020-39252
Product Name: DXZ Lid Clamp Spring Shim
Product Description: A precision-formed spring steel shim designed to provide consistent, uniform clamping force for DXZ chamber lids. Ensures a reliable, vacuum-tight seal by compensating for minute dimensional variations and thermal expansion/contraction.
Technical Specifications:
- Material: High-strength, spring-tempered stainless steel (17-7 PH, condition C)
Detailed content
- Thickness: 0.015 inches (nominal)
- Finish: Passivated for corrosion resistance
- Flatness: ±0.001 inches
- Spring Rate: 25 lbs/inch
Functional Features:
- Maintains constant spring tension across a wide temperature range (-40°C to 200°C)
- Prevents gasket creep and ensures uniform seal compression
- High fatigue resistance for millions of maintenance cycles
- Easy to install and replace during PM (Preventive Maintenance)
Application Scenarios: Specifically engineered for the DXZ (Dual-frequency eXcited Zones) chamber lids on Applied Materials P5000 and Centura platforms, ensuring vacuum integrity during dielectric etch and deposition processes.
