Digital guide
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AMAT 0020-39087
Product Name: Electrostatic Chuck (ESC) Pedestal Assembly
Product Description: 195mm electrostatic chuck pedestal with notch configuration for DPS semiconductor etch chambers.
Technical Specifications:
- Wafer Compatibility: 200mm (8″) wafers
- Chuck Type: Coulombic electrostatic chuck
Detailed content
- Material: Aluminum nitride (AlN) ceramic
- Diameter: 195mm with precision notch
- Heating Element: Integrated resistive heater
- Maximum Temperature: 300°C
- Clamping Voltage: 1-3kV DC
Functional Features:
- Secure electrostatic wafer clamping without mechanical contact
- Uniform temperature distribution across wafer surface
- Rapid thermal response for precise process control
- Excellent thermal conductivity for efficient heat transfer
- RFI/EMI shielding for electrical noise suppression
Application Scenarios:
- Wafer clamping in DPS etch chambers
- Electrostatic wafer holding in semiconductor etch processes
- High-temperature wafer processing in 200mm systems
- Centura platform dielectric etch components
