Digital guide
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AMAT 0020-35576
Product Name: Chamber Isolation Shield / Liner Assembly
Product Description: A consumable metallic or ceramic shield installed within the process chamber to electrically isolate components, contain plasma, and protect the chamber body from process byproducts.
Technical Specifications:
- Material: High-purity Aluminum, Anodized Aluminum, or Yttria-coated metal.
Detailed content
- Form: Precision-stamped or machined cylindrical sleeve.
- Coating: Anti-sputter, plasma-resistant coating.
- Tolerances: Tight dimensional tolerances for precise fit.
Functional Features:
- Electrical Isolation: Prevents unintended RF coupling and arcing.
- Plasma Confinement: Shapes plasma for uniform processing.
- Contamination Control: Acts as a consumable barrier, reducing chamber cleaning frequency.
- Thermal Resistance: Withstands high chamber temperatures and thermal cycling.
Application: Used in Etch and PVD chambers to protect walls and maintain process purity.
