Digital guide
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AMAT 0020-34985
- Product Name: Ceramic Lift Pin Guide Assembly
- Product Description: A precision ceramic guide and bushing assembly for wafer lift pins, ensuring smooth, vertical motion and electrical isolation in vacuum environments.
- Technical Specifications:
- Material: Machinable glass ceramic (Macor) / High-purity alumina.
Detailed content
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- Dimensions: 12mm ID x 25mm OD x 30mm length.
- Tolerance: ID ground to H6 tolerance (±0.003mm).
- Surface Finish: Polished to Ra < 0.4 μm for low friction.
- Functional Features:
- Zero particle generation due to ultra-smooth finish.
- Excellent wear resistance for millions of lift cycles.
- Full electrical isolation (10^12 ohms resistivity).
- Non-porous structure prevents outgassing and contamination.
- Application Scenarios: Guides silicon carbide (SiC) lift pins in oxide etch, PECVD, and ALD chambers for 200mm and 300mm wafer handling systems.
