Digital guide
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AMAT 0020-32963
Product Name: Pedestal Lift Mechanism (Z-Axis Drive)
Product Introduction: The mechanical assembly responsible for raising and lowering the process pedestal (where the wafer sits) to engage with the vacuum robot or to position for process recipes.
Technical Specifications:
- Drive Type: Ball screw or Roller screw linear actuator.
- Motor: Brushless DC servo motor or Stepper motor.
Detailed content
- Stroke Length: 100mm to 300mm.
- Positioning Accuracy: ±10 micrometers.
- Load Capacity: Supports the weight of the pedestal, ESC, and wafer (up to 20kg).
- Speed: Up to 100 mm/s.
Functional Features: - Vacuum Compatibility: All moving parts are sealed or made of low-outgassing materials.
- Magnetic Coupling: Often uses magnetic couplings to transmit force into the vacuum chamber without dynamic seals.
- Home Sensor: Precise home position sensor for repeatable alignment.
- Brake System: Fail-safe brake to prevent pedestal drop during power loss.
Application Scenarios: - Wafer Handoff: Lowers the pedestal to allow the robot blades to slide under the wafer.
- Process Positioning: Raises the pedestal to the optimal position for plasma ignition and processing.
- Maintenance Mode: Lowers the pedestal to a service position for chamber cleaning.
