Digital guide
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Detailed content
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- Dielectric Strength: >30kV/mm
- Volume Resistivity: >10¹⁵ ohm-cm at 200°C
- Temperature Resistance: Up to 800°C continuous
- Compressive Strength: >350MPa
- Dimensions: Precision machined to OEM specifications
- Functional Features:
- Superior electrical isolation in high-voltage DC bias systems
- Excellent thermal stability at elevated temperatures
- Exceptional resistance to thermal shock
- High mechanical strength for reliable performance
- Chemical inertness to process plasmas and gases
- Application Scenarios:
- Used in AMAT Endura PVD chambers
- Applied in DC bias subsystems for electrostatic chucks
- Deployed in high-power magnetron sputtering applications
- Utilized in 200mm and 300mm metal deposition processes
- Suitable for high-vacuum semiconductor manufacturing environments
