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AMAT 0020-31294
Brand & Part Number: Applied Materials (AMAT) 0020-31294
Product Name: Right Chamber Wall Liner
Product Description: A precision-machined metal liner plate forming the right-side interior wall of a process chamber, protecting the main chamber body and optimizing process geometry.
Detailed content
Technical Specifications:
- Material: 5083 aluminum alloy, hard anodized
- Dimensions: Custom contoured to chamber specifications
- Surface Finish: Electropolished internal surface, Ra ≤ 0.5 μm
- Mounting: Precision-drilled mounting holes for secure fastening
- Vacuum Compatibility: UHV-rated (10⁻⁹ Torr)
Functional Features:
- Smooth, non-particulating surface to minimize particle traps
- Corrosion-resistant anodized coating
- Precise fit to maintain chamber vacuum integrity
- Designed for easy removal during maintenance
Application: Installed in advanced process chambers (ASP) as part of the interior shielding system.
